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Hydrogen Sensing Properties of Anodically Synthesized Porous TiO2 Film Coated with Pd Thin Film and Its Mechanical Enhancement by the Bottom Electrode Configuration

Jongyun Moon, Hannu-Pekka Hedman, Marianna Kemell, Ermei Makila, Jarno Salonen, Aulis Tuominen, Risto Punkkinen, Hydrogen Sensing Properties of Anodically Synthesized Porous TiO2 Film Coated with Pd Thin Film and Its Mechanical Enhancement by the Bottom Electrode Configuration. In: Javier Brey Sánchez (Ed.), Proceedings of European hydrogen energy conference , 600–604, European hydrogen association, 2014.

Abstract:

We report a hydrogen sensor having metal electrodes under the porous TiO2 film, which was made by anodization of Ti film sputtered on SiO2/Si substrate. Metal electrodes (Al, Au) were deposited on SiO2/Si substrate before Ti deposition. After anodization using organic electrolyte, a thin Pd film was deposited on the surface of TiO2 film. The material properties, such as pore structure, morphology and elemental composition were studied by FESEM and EDS. The response of the sensor based on the resistance change was measured at hydrogen concentrations ranging from 1 ppm to 10,000 ppm in ambient air at different temperatures.

BibTeX entry:

@INPROCEEDINGS{inpMoHeKeMaSaTuPu14a,
  title = {Hydrogen Sensing Properties of Anodically Synthesized Porous TiO2 Film Coated with Pd Thin Film and Its Mechanical Enhancement by the Bottom Electrode Configuration},
  booktitle = {Proceedings of European hydrogen energy conference },
  author = {Moon, Jongyun and Hedman, Hannu-Pekka and Kemell, Marianna and Makila, Ermei and Salonen, Jarno and Tuominen, Aulis and Punkkinen, Risto},
  editor = {Sánchez, Javier Brey},
  publisher = {European hydrogen association},
  pages = {600–604},
  year = {2014},
}

Belongs to TUCS Research Unit(s): Other

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